Substrate holding system and exposure apparatus using the same

ABSTRACT

A substrate holding system for holding a substrate based on vacuum attraction and electrostatic attraction including a rim configured to support the substrate, a protrusion for the electrostatic attraction, configured to support the substrate inside the rim, and a protrusion for the vacuum attraction, configured to support the substrate inside the rim. A substrate supporting surface area of the protrusion of the electrostatic attraction is larger than a substrate supporting surface area of the protrusion for the vacuum attraction.

This application is a divisional application of U.S. patent applicationSer. No. 11/770,979, filed Jun. 29, 2007, which will issue as U.S. Pat.No. 7,466,531 on Dec. 16, 2008, and which is a divisional of U.S. patentapplication Ser. No. 10/952,732, filed Sep. 30, 2004, which issued asU.S. Pat. No. 7,292,426 on Nov. 6, 2007.

This application also claims priority from Japanese Patent ApplicationNo. 2003-343676 filed Oct. 1, 2003, which is hereby incorporated byreference herein.

FIELD OF THE INVENTION AND RELATED ART

This invention relates to a substrate holding technique suitable forsafely and securely holding even a warped substrate. More particularly,the invention concerns a substrate holding technique suitably usable inan apparatus, such as a semiconductor exposure apparatus using extremeultraviolet (EUV) light or a charged-particle beam, wherein a substrateis processed in a vacuum or a reduced pressure ambience.

The density and fineness of semiconductor devices are advancing muchmore, and a substrate holding system is required to have a capability ofholding a substrate at a higher precision. If the substrate holdingprecision is insufficient, a printed pattern or an overlay precision isdegraded.

Conventionally, a substrate such as a wafer is held in accordance with amechanical holding method or a vacuum attraction holding method.

The mechanical holding method is a simple method in which only anoutside peripheral portion of a wafer is physically clamped. Although ithas a feature of being less susceptible to the influence of theenvironment, since only the outer periphery of the wafer is held, thereis a problem of deformation of the wafer or damaging the wafer.

The method based on vacuum attraction is a method in which the bottomface of a wafer is supported by many protrusions and a negative pressureis created in the clearance between the wafer and a substrate attractingdevice, by which the wafer is attracted. As compared with the mechanicalholding method, this method is advantageous in the point of suppressingwafer deformation because the whole wafer surface is attracted. However,this method cannot be used in a vacuum ambience, and it cannot beapplied to apparatuses using a vacuum.

On the other hand, there is a method based on an electrostatic force.Since this method uses electrostatic force, it can be used even in avacuum or a reduced pressure ambience. Thus, actually, it is supplied tovarious device manufacturing processes such as an etcher, a PVD or aCVD. In regard to exposure apparatuses, particularly, in an electronbeam exposure apparatus or an EUV exposure apparatus, the exposureprocess has to be carried out in a vacuum ambience to avoid attenuationof an electron beam or EUV light. Thus, in such apparatuses, use of asubstrate holding system based on electrostatic force is considered tobe required.

Substrates such as wafers to be processed in semiconductor manufacturingsteps are not always uniform in a plane, and, in some cases, they mayhave a large warp as a result of a film forming process, for example.

Conventionally, an attraction force can be applied to the whole wafersurface by vacuum attraction such that the warp of the wafer can becorrected thereby. However, as described, this technique cannot be usedin a system operated in a vacuum ambience.

On the other hand, electrostatic attraction cannot easily meet suchwarping of a wafer, as compared with the vacuum attraction. Generally,in a substrate holding system, the contact surface to a wafer is limitedso as to prevent degradation of the flatness due to biting of particles.In the electrostatic attraction, basically, the attraction force isproduced at the contact surface.

To avoid this problem, Japanese Laid-Open Patent Application,Publication No. 6-204325, proposes an electrostatic attracting devicehaving stripe-like electrodes and means for applying a voltage to eachelectrode independently. For example, voltages are applied sequentiallyto these electrodes in an order from a central electrode to a peripheralelectrode or from one end electrode to the other end electrode, forexample, to ensure that a warped wafer sequentially follows thesubstrate attracting device. With this method, if a wafer is warped in aparabolic shape, such as an upward convex or a downward convex shape,the flatness correction may be attainable. However, if a wafer is warpedirregularly, correction is difficult to achieve.

Furthermore, after the wafer flatness correction, the wafer must beconveyed to a substrate processing chamber while holding the correctedstate. Japanese Patent No. 2633516 discloses a method in which asubstrate is attracted onto an electrostatic attraction device outside asubstrate processing chamber and it is conveyed into the substrateprocessing chamber. In accordance with this patent document, however,the voltage supply to the electrostatic attraction device is onceinterrupted during the conveyance. Therefore, the substrate flatnesscorrection is discontinued during the conveyance. Here, the substrateprocessing chamber may be, for example, an exposure chamber in the caseof an exposure apparatus.

Japanese Laid-Open Patent Application, Publication No. 2003-142393,discloses a method in which, by use of a substrate attracting devicehaving a vacuum attracting mechanism and an electrostatic attractingmechanism, a substrate is flatness-corrected by vacuum attractionoutside a substrate processing chamber (a load lock chamber, forexample), and thereafter, the attraction is changed to electrostaticattraction and the substrate is conveyed into the substrate processingchamber. More specifically, in a load lock chamber, which is separatefrom the substrate processing chamber, first, only the clearance betweenthe substrate and the substrate attracting device is exhausted and,after the substrate is vacuum attracted, a voltage is applied to a chuckto change the attraction to electrostatic attraction. Thereafter, theclearance between the substrate and the substrate attracting device isopened to the atmosphere to release the vacuum attraction. Subsequently,a vacuum is introduced into the load lock chamber until the insidepressure thereof becomes approximately equal to that of the substrateprocessing chamber.

Here, the pressure changes through a low discharge generating voltageregion of a Paschen's electrical discharge voltage graph, as shown inFIG. 11, that is, through a minimum value (Vs(MIN)) region. Therefore,electrical discharge can easily occur between the substrate and thesubstrate attracting device to which the voltage is being applied. Forexample, if the clearance between the substrate and the substrateattracting device is 100 μm, as shown in FIG. 11, the discharge voltagetakes a minimum value of 300 V at a pressure of 7 [kPa]. Therefore, ifthe pressure of the clearance is lowered from the atmospheric pressure(101 [kPa]) to the substrate processing chamber pressure (not greaterthan 1 [kPa]), the change inevitably passes the minimum value and theelectrical discharge quite easily occurs. If an electrical dischargeoccurs between the substrate and the substrate attracting device, it maycause damage to the substrate or breakage of devices on the substrate.Furthermore, the discharge may create dust particles, which contaminatethe substrate and the substrate attracting device. In consideration ofthis, according to this patent document, a low voltage is applied to thechuck so as to avoid an occurrence of the electrical dischargephenomenon during exhaust of the load lock chamber.

However, if the voltage for electrostatic attraction is made low (notgreater than 300 V), a sufficient attraction force is not produced and,therefore, it is unable to achieve secure flatness correction of awarped substrate.

As described above, in the semiconductor manufacturing processes,particularly, in an exposure process, or the like, in which a very finepattern is processed, even if a substrate, such as a wafer, has a warp,it should be securely corrected so as to be flat. Furthermore, in thecase of a manufacturing apparatus that uses a vacuum ambience therein,the fact that conventional vacuum attracting mechanisms are unusable andthat electrical discharge easily takes place in the electrostaticattracting mechanism should be taken into account, and yet safe andsecure substrate flatness correction must be done to improve the overlayprecision and the throughput.

SUMMARY OF THE INVENTION

It is accordingly an object of the present invention to solve at leastone of the inconveniences described above.

In accordance with an aspect of the present invention, to achieve thisobject, there is provided a substrate holding system having a chuck forvacuum attraction and electrostatic attraction of a substrate, thesystem comprising a ring-like rim for carrying a substrate thereon, aplurality of first protrusions disposed inside the rim, for carrying thesubstrate thereon, and a plurality of second protrusions disposed insidethe rim, for carrying the substrate thereon, wherein a substratecarrying surface area of at least one first protrusion is smaller than asubstrate carrying surface area of at least one second protrusion andwherein a smallest interval of the first protrusions is smaller than asmallest interval of the second protrusions.

In accordance with the present invention, flatness correction of asubstrate can be stabilized.

These and other objects, features and advantages of the presentinvention will become more apparent upon consideration of the followingdescription of the preferred embodiments of the present invention takenin conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic view of a structure of a substrate attractingdevice according to a first embodiment of the present invention.

FIGS. 2A and 2B are sectional views of the structure of the FIG. 1embodiment.

FIGS. 3A and 3B are schematic views of a structure of a substrateattracting device according to a second embodiment of the presentinvention.

FIGS. 4A and 4B are schematic and sectional views for explaining theoperation of a power supplying system for transfer of a substratebetween a conveying hand and a fixed plate, in the structure of FIG. 1.

FIG. 5 is a schematic view of a structure of a substrate attractingdevice in a substrate correcting device according to a third embodimentof the present invention.

FIG. 6 is a schematic and sectional view of the structure of thesubstrate correcting device of the third embodiment of the presentinvention.

FIG. 7 is a schematic and sectional view for explaining a vacuumattraction piping structure in the substrate attracting device of thethird embodiment of the present invention.

FIG. 8 illustrates a conventional vacuum attraction piping structure.

FIG. 9 is a schematic and diagrammatic view of a structure of asubstrate correcting device in a load lock chamber, according to afourth embodiment of the present invention.

FIG. 10 is a flow chart for explaining the substrate correctingoperation in the structure of FIG. 9.

FIG. 11 is a graph of the theory of Paschen's electrical dischargepotential.

FIG. 12 is a flow chart for explaining the sequence of devicemanufacturing processes.

FIG. 13 is a flow chart for explaining details of a wafer processincluded in the procedure of FIG. 12.

FIG. 14 is a schematic view of a device manufacturing exposureapparatus.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Preferred embodiments of the present invention will now be describedwith reference to the attached drawings.

Embodiment 1

FIGS. 1, 2A and 2B illustrate the structure of a substrate attractingdevice according to a first embodiment of the present invention. In FIG.1, a substrate attracting portion (chuck) 101 includes protrusions(first protrusions) 102 mainly for electrostatic attraction, protrusions(second protrusions) 103 mainly for vacuum attraction, a ring-like rim104 adapted to apply a vacuum between the substrate and the substrateattracting portion, and an exhaust port 105. The total area of thesubstrate carrying surface as defined by the group of protrusions 103for the vacuum attraction is made larger than the total area of thesubstrate carrying surface as defined by the group of protrusions 102for electrostatic attraction. Furthermore, each protrusion 103 forvacuum attraction has a smaller carrying surface area than theprotrusion 102 for electrostatic attraction, and also the interval ofthe protrusions 103 is smaller than that of the protrusions 102. Each ofthe protrusions 102 and 103 has a height not lower than 50 [im].

In vacuum attraction, attraction forces act on the region other than thecontact surface between a substrate 106 (FIGS. 2A and 2B) and thesubstrate attracting portion 101 (more exactly, the substrate carryingsurfaces of the protrusions 102 and 103, and the rim 104). If,therefore, the interval between the protrusions is wide, the substratereceives a downward force and it is curved downwardly. In thisembodiment, since the substrate can be supported at multiple points bymeans of the protrusions 103 having narrow intervals, deformation of thesubstrate can be made sufficiently small. Here, for better flatness ofthe substrate, the substrate carrying surface area of the protrusions103, as well as the interval of them, should desirably be made as smallas possible.

In electrostatic attraction, basically, the substrate is attracted andheld by the contact surface between the substrate 106 and the substrateattracting portion 101 (more exactly, the substrate carrying surfaces ofthe protrusions 102). Therefore, this contact surface should have acertain area. In this embodiment, a sufficient contact surface area issecured by the protrusions 102 as a whole and, by producing anattraction force to the whole substrate surface, the substrate can bewell attracted and held. In order to secure a contact surface area toobtain a sufficient electrostatic attraction force, the surface area ofthe protrusions 102 should be made as large as possible. However, takinginto account the risk of substrate flatness degradation due to increasedprobability of particle bite, it should be designed appropriately.

With the structure described above, in a substrate attracting devicehaving both a vacuum attracting mechanism and an electrostaticattracting mechanism, whichever one is operated or even when both areoperated, the substrate can be attracted and held to the substrateattracting device with good flatness.

Particularly, as regards a substrate being warped, first, the vacuumattracting mechanism may be operated to correct the warp and,subsequently, the electrostatic attracting mechanism may be operated. Onthat occasion, even if the substrate is moved into a vacuum ambience,the flatness of the corrected substrate can be well maintained.

FIGS. 2A and 2B illustrate a section when a substrate 106 is placed onthe substrate attracting device of this embodiment. As regards thematerial of the substrate attracting portion 101, from the standpoint ofrigidity or weight, for example, may be used as a base material. Fromthe standpoint of thermal expansion, a low thermal expansion materialmay preferably be used as a base material.

As regards the method of forming protrusions 102 and 103 upon the basematerial, a blast processing method may be used, for example. Here, asshown in FIG. 2A, the vacuum attraction protrusion 102 having a smallersectional area may be formed to a depth of 50 im or more, while keepinga constant section area. If, however, insufficient rigidity isconcerned, as shown in FIG. 2B, at some depth, the sectional area may beenlarged for increased rigidity.

Embodiment 2

FIGS. 3A, 3B, 4A and 4B illustrate the structure of a substrateattracting device according to a second embodiment of the presentinvention. In the second embodiment, a substrate attracting portion(chuck) 201 having at least an electrostatic attracting mechanism isprovided with a power supply terminal 202 for during conveyance of thesubstrate attracting portion, and a power supply terminal 203 for duringfixation (stationary) of the substrate attracting portion.

FIGS. 3A and 3B show a power supplying line 206 for the substrateattracting portion 201 when the same is being conveyed by a conveyinghand 205. The power supply terminal 202 for during conveyance isprovided at a location separate from the power supply terminal 203 forduring fixation of the substrate attracting portion, and electricalpower is supplied from the power supplying line 206 of the conveyinghand 205. The conveying hand 205 may have any arbitrary shape, and alsothe power supply terminal 202 may be provided at any arbitrary location.However, for convenience of cable setting, it should desirably beprovided adjacent to a position where the conveying hand 205 grasps thesubstrate attracting portion 201.

FIGS. 4A and 4B illustrate a power supply line for during transfer of achuck between the conveying hand 205 and a chuck supporting table 207.In the state illustrated, electrical power can be supplied to thesubstrate attracting portion 201 from both of a power supplying line 208from the chuck supporting table 207 and a power supplying line 206 fromthe conveying hand 205. As regards the chuck supporting table 207, if,in an exposure apparatus, the substrate attracting portion 201 is heldfixed within an exposure chamber (substrate processing chamber), it maybe a stage. If the substrate attracting portion is held fixed outsidethe substrate processing chamber, for example, fixed in a load lockchamber, it may be a supporting table provided there. As shown in FIG.4A or 4B, the power supplying terminal 203 for during fixation of thesubstrate attracting portion 201 may be provided at the bottom face ofthe substrate attracting portion, or it may provided at any locationsuch as upon a side face of the substrate attracting portion 201, forexample.

As described above, in relation to at least one electrode of thesubstrate attracting portion 201, both a conveyance-period powersupplying terminal 201 and a fixation-period power supplying terminal203 are prepared. With this structure, electrical power can be suppliedfrom respective power supplying lines 206 and 208. As a result, even ifthe state of substrate attracting portion 201 changes in an order offixation, conveyance and fixation, for example, the power can besupplied thereto continuously.

As regards the power supplying terminal, for prevention of electricaldischarge or for safety, it should desirably be covered by insulation.

In the structure described above, even if the substrate is warped andflatness correction is not easy, it is possible that the flatnesscorrection is done outside a substrate processing chamber, for example,in a load lock chamber in which a relatively wide freedom is availablein terms of space and environment, and, subsequently, the substrate isconveyed into the substrate processing chamber while keeping thecorrected flatness. Therefore, an increase of yield resulting fromsecured flatness correction and an increase of throughput resulting fromomission of a substrate attracting step inside the substrate processingchamber, as well, can be achieved.

For better results, three protrusions may desirably be formed on thebottom face of the substrate holding portion 201 to provide athree-point support structure. On that occasion, the same supportingstate can be maintained continuously even if the fixing position of thesubstrate attracting portion is shifted, and, therefore, a betterreproducibility of the substrate attracting state and improved overlayprecision are assured.

Embodiment 3

FIGS. 5 and 6 illustrate the structure of a substrate correcting deviceaccording to a third embodiment of the present invention. In the thirdembodiment, a substrate attracting portion (chuck) 301, having at leastan electrostatic attracting mechanism, is provided with electrodes 302,which are arrayed in a stripe-like fashion, as shown in FIG. 5, andalso, means for applying a voltage to each electrode is provided.Although, in FIG. 5, the shape of other substrate carrying surfaces isdefined by protrusions 303 and a ring-like rim 304, any other structuremay be used. However, for a secured attraction force, it is preferableto provide electrodes throughout the whole carrying surface as much aspossible.

In this embodiment, as shown in FIG. 6, there is a chuck rotatingmechanism 36 for rotationally moving the chuck 301 to thereby change theorientation of the stripe-like electrodes 302 as desired. In FIG. 6, therotating mechanism 316 is connected to the chuck supporting table 311and placed inside a chamber 315, which may be a substrate processingchamber or a load lock chamber. However, the rotating mechanisms mayhave any other structure, and it may be provided inside the substrateattracting portion 301.

In the structure described above, when a voltage is applied sequentiallyto the electrodes, from one at an end in FIG. 5, for example, a warpedsubstrate can be consecutively attracted to the substrate attractingportion from its end portion, by which the substrate can be corrected tobe flat. Furthermore, by rotating the substrate attracting portion, itcan meet correction of irregularly warped substrates. The orientation ofthe substrate attracting portion may be determined by measuring the warpshape of a substrate beforehand. Alternatively, once a substrate isattracted and, if flatness correction is not good, the orientation ischanged by rotation until good flatness correction is enabled.

Embodiment 4

FIG. 7 illustrates a vacuum attraction piping (exhausting labyrinth)structure of a substrate attracting device according to a fourthembodiment of the present invention. In the structure of FIG. 7, in asubstrate attracting portion (chuck) 401 having at least a vacuumattracting mechanism, a vacuum exhaust pipe 404 is disposed opposed toan exhaust portion 403 for vacuum attraction, inside the substrateattracting portion, with a small clearance intervening therebetween.Also, there is a partition wall 405, which functions to prevent a gas,outside a closed space defined by the substrate attracting portion andthe substrate, from flowing into the exhaust port 403 and into thatclosed space through the small clearance.

The width of the small clearance is set to an extent (about 5 [im]), forexample) making the conductance of the clearance sufficiently small toprevent inflow of the gas.

Conventionally, for vacuum attraction, a seal member, such as an O-ring,is pressed against the bottom face of a substrate attracting portion or,alternatively, as shown in FIG. 8, an exhaust pipe 414 is directlyattached to an exhaust port 413 of the substrate attracting portion 401while using a seal member, such as an O-ring 416. In FIG. 8, denoted at415 is a pipe connecting mechanism. In these structures, however, sincea force can be applied to the substrate attracting portion 401 from theexhaust pipe 414 through the seal member, small distortion may becreated in the substrate attracting portion 401. Furthermore, thedistortion to be produced in the substrate attracting portion 401 isvariable in dependence upon the connection state with seal member 416.Therefore, the flatness correction state of the substrate 402 cannot bereproduced.

In this embodiment, in consideration of it, as shown in FIG. 7, anon-contact vacuum seal structure is provided between the exhaust pipe404 and the vacuum attracting portion 401, thereby to preventtransmission of a force from the exhaust pipe 404 to the vacuumattracting portion 404. With this arrangement, substrate flatnesscorrection of good reproducibility is achieved.

In the case of a system wherein a substrate attracting portion is madeconveyable, simply by placing the substrate attracting portion 401 onthe chuck supporting table 406, a vacuum seal is enabled. On such anoccasion, therefore, a mechanism or a step for every time connecting avacuum pipe to the substrate attracting portion can conveniently beomitted. Furthermore, since no heat is transferred to the substrateattracting portion from the load lock chamber, or the like, through thevacuum pipe, the structure for preventing thermal deformation of thesubstrate attracting portion can be omitted or simplified.

These advantageous features function particularly effectively in thestructure that the substrate attracting portion 401 is supported on thechuck supporting table 406 by three-point support. When the substrateattracting portion 401 is supported at three points, although there mayoccur self-weight deformation in the substrate attracting portion andthe flatness of the substrate carrying surface may be degraded, theflatness of the substrate carrying surface can be improved by flatteningthe same while leaving the self-weight deformation as it is. If it isdifficult to perform the flattening while keeping the self-weightdeformed condition, depending on the process condition, or the like, anappropriate external force may be applied to cause deformation,equivalent to self-weight deformation, in the substrate attractingportion and then the flattening process may be carried out.

Furthermore, if the vacuum seal effect of the non-contact partition wall405 should be improved much more, a groove surrounding the exhaust pipe104 may be formed in the partition wall, as disclosed in Japanese PatentNo. 2587227, and the groove may be exhausted by means of a vacuum pump,or the like. By this, the vacuum seal effect can be enhanced.

Embodiment 5

FIG. 9 illustrates a general structure of a substrate correcting deviceaccording to a fifth embodiment of the present invention. The substratecorrecting device of FIG. 5 mainly comprises a substrate attractingportion (chuck) 501 having an electrostatic attracting mechanism and avacuum attracting mechanism, a power supply line 507 for operating theelectrostatic attracting mechanism, an exhaust port 503 provided in thesubstrate attracting portion 501, for operating the vacuum attractingmechanism, a vacuum pump 516 for exhausting a clearance between asubstrate 502 and the substrate attracting portion 501 and exhaustingthe load lock chamber 511, a valve 512 of a pipe extending from thevacuum pump 516 to the load lock chamber 511, a valve 513 of a pipeconnected to the exhaust port 503, pressure gauges 514 and 515 formeasuring the pressure of the clearance between the substrate and thesubstrate attracting portion and the pressure of the load lock chamber511, respectively, and a controller 517 for controlling the valves 512and 513, as well as the vacuum pump 516.

FIG. 10 is a flow chart, illustrating the operation of the structuredescribed above. Initially, a substrate 502 is conveyed onto thesubstrate attracting portion 501 is conveyed onto the substrateattracting portion 501 inside the load lock chamber 511. Then, thevalves 512 and 513 are opened and the vacuum pump 516 is actuated, toreduce the pressure inside the load lock chamber 511 and the pressure inthe clearance between the substrate 502 and the substrate attractingportion 501 to an appropriate pressure, respectively, simultaneously.The pressure, here, corresponds to a differential pressure necessary forvacuum attracting the substrate 502. If, for example, the appropriatedifferential pressure for vacuum attraction of a substrate 502 in acertain substrate attracting portion 502 is 30 [kPa], the pressure inthe whole is reduced to 30 [kPa]. Subsequently, the load lock chambervalve 512 is closed, and only the clearance between the substrate 502and the substrate attracting portion 501 is vacuum exhausted, wherebythe substrate 502 is vacuum attracted. After it is discriminated thatthe pressure of the clearance between the substrate 502 and thesubstrate attracting portion 501 has passed the minimum value ofPaschen's discharge potential graph (FIG. 11) and it has reached apressure level (e.g., 100 Pa) whereat the electrical discharge does noteasily occur (i.e., the discharge potential is sufficiently high), theelectrostatic attracting mechanism is actuated by the power supplyingline 507, whereby the substrate 502 is electrostatically attracted ontothe substrate attracting portion 501.

Thereafter, the valve 513 is closed to prevent back flow of air into theclearance between the substrate 502 and the substrate attracting portion501 and, then, the valve 512 is opened to vacuum-exhaust the load lockchamber 511. Here, if the pressure of the clearance between thesubstrate 502 and the substrate attracting portion 501 cannot bemaintained constant due to gas leakage, or the like, an exclusive vacuumpump may be preferably provided separately to keep that pressureconstant. After it is discriminated that the pressure of the load lockchamber 511 has passed the minimum value of Paschen's dischargepotential graph (FIG. 11) and it has reached a pressure level whereatthe electrical discharge does not easily occur (i.e., the dischargepotential is sufficiently high), the valve 513 is opened and a vacuum isapplied until the pressure as a whole becomes approximately equal tothat of the substrate processing chamber (not greater than 1 Pa).Through these sequential operations, even if a high voltage enabling theflatness correction is applied to the chuck, there is no possibility ofelectrical discharge between the substrate 502 and the substrateattracting portion 501.

Thereafter, the substrate 502 and the substrate attracting portion 501are conveyed into the substrate processing chamber (not shown), andprocessing operations for the substrate 501 are initiated. Here, thestructure having been described with reference to the second embodimentmay be applied, and two or more power supplying systems, such as thefixation-period power supplying terminal 502 and the conveyance-periodpower supplying terminal 509, may be used. With this arrangement, thesubstrate 502 can be conveyed into the substrate processing chamberwhile the flatness corrected state is kept secured.

Alternatively, the structure of the substrate carrying surface of thesubstrate attracting device having been described with reference to thefirst embodiment may be applied and, by using either one of the vacuumattraction force and the electrostatic attraction force or by using bothof them, the substrate can be held in a flatness well-corrected state.

Furthermore, the structure described with reference to the fourthembodiment may be applied, and a partition wall 505 may be providedinside the load lock chamber and a vacuum exhaust pipe 504 may beconnected to the exhaust port 504 without contact thereto. In such astructure, the mechanism or steps for connecting a vacuum pipe to thesubstrate attracting portion every time it is conveyed thereto, can beomitted. Since there is no effect of insulating thermal externaldisturbance to the substrate attracting portion or no restriction due tothe piping, the condition of confinement to the substrate attractingportion inside the load lock chamber and inside the substrate processingchamber can be made equivalent to each other. Therefore, a flatnesscorrected state having a good reproducibility is achieved. Thisstructure is particularly effective when the substrate attractingportion 501 is supported on the chuck supporting table at three points.With this arrangement, the substrate attracting portion can hold thesame three-point supported state continuously. Therefore, the substrateattracting state has good reproducibility, and thus, the overlayprecision, and the like, is improved significantly.

In accordance with the attraction and conveyance sequence for asubstrate and a substrate attracting device such as describedhereinbefore, the substrate can be flatness corrected with goodreproducibility, while avoiding damage to the substrate or a substrateattracting device due to electrical discharge. Additionally, thesubstrate can be conveyed into the substrate processing chamber whilethe flatness corrected state is maintained securely.

In accordance with the structures of the embodiments describedhereinbefore, a substrate can be securely flatness-corrected, and it canbe conveyed into a substrate processing chamber while avoiding damage tothe substrate or substrate attracting device due to electrical dischargeand while maintaining the corrected flatness. Therefore, in a devicemanufacturing apparatus using such an exposure apparatus having asubstrate attracting device or a chuck and holding device, thethroughput and the substrate positioning precision, as well as theoverly precision, in the exposure apparatus are improved.

Embodiment 6

Next, referring to FIGS. 12 and 13, an embodiment of a devicemanufacturing method, which uses an exposure apparatus having asubstrate attracting device such as described above, will be explained.

FIG. 12 is a flow chart for explaining the procedure of manufacturingvarious microdevices such as semiconductor chips (e.g., ICs or LSIs),liquid crystal panels, CCDs, thin film magnetic heads or micro-machines,for example. Step 1 is a design process for designing a circuit of asemiconductor device. Step 2 is a process for making a mask on the basisof the circuit pattern design. Step 3 is a process for preparing a waferby using a material such as silicon. Step 4 is a wafer process, which iscalled a pre-process, wherein, by using the thus prepared mask andwafer, a circuit is formed on the wafer in practice, in accordance withlithography. Step 5, subsequent to this, is an assembling step, which iscalled a post-process, wherein the wafer having been processed at step 4is formed into semiconductor chips. This step includes an assembling(dicing and bonding) process and a packaging (chip sealing) process.Step 6 is an inspection step wherein an operation check, a durabilitycheck, and so on, for the semiconductor devices produced by step 5, arecarried out. With these processes, semiconductor devices are produced,and they are shipped (step 7).

FIG. 13 is a flow chart for explaining details of the wafer process.Step 11 is an oxidation process for oxidizing the surface of a wafer.Step 12 is a CVD process for forming an insulating film on the wafersurface. Step 13 is an electrode forming process for forming electrodesupon the wafer by vapor deposition. Step 14 is an ion implanting processfor implanting ions to the wafer. Step 15 is a resist process forapplying a resist (photosensitive material) to the wafer. Step 16 is anexposure process for printing, by exposure, the circuit pattern of themask on the wafer through the exposure apparatus described above. Step17 is a developing process for developing the exposed wafer. Step 18 isan etching process for removing portions other than the developed resistimage. Step 19 is a resist separation process for separating the resistmaterial remaining on the wafer after being subjected to the etchingprocess. By repeating these processes, circuit patterns are superposedlyformed on the wafer.

With these processes, high density microdevices can be manufactured in areduced cost.

Embodiment 7

FIG. 14 shows an exposure apparatus for device manufacture, having asubstrate attracting device as described hereinbefore.

This exposure apparatus is to be used for the manufacture ofmicrodevices having a fine pattern formed thereon, such as semiconductordevices (semiconductor integrated circuits, for example), micromachines,or thin-film magnetic heads, for example. In this exposure apparatus,exposure light (which may include visible light, ultraviolet light, EUVlight, X-rays, electron beams, and charge particle beams, for example),as exposure energy supplied from a light source 61, illuminates areticle R (original), and light from the reticle is projected onto asemiconductor wafer W (substrate) through a projection system having aprojection lens 62 (which may include a refractive lens, a reflectivelens, a catadioptric lens system, and a charged particle lens, forexample), whereby a desired pattern is produced on the substrate.

The exposure apparatus includes a base table 51 having a guide 52 and alinear motor stator 21 fixed thereto. The linear motor stator 21 has amultiple-phase electromagnetic coil, while a linear motor movableelement 11 includes a permanent magnet group. The linear motor movableportion 11 is connected as a movable portion 53 to a movable guide 54(stage), and through the drive of the linear motor M1, the movable guide54 can be moved in a direction of a normal to the sheet of the drawing.The movable portion 53 is supported by a static bearing 55, taking theupper surface of the base table 51 as a reference, and also by a staticbearing 56, taking the side surface of the guide 52 as a reference.

A movable stage 57, which is a stage member disposed to straddle themovable guide 54, is supported by a static bearing 58. This movablestage 57 is driven by a similar linear motor M2, so that the movablestage 57 leftwardly and rightwardly as viewed in the drawing, whiletaking the movable guide 54 as a reference. The motion of the movablestage 57 is measured by means of an interferometer 60 and a mirror 59,which is fixed to the movable stage 59.

A wafer (substrate) W is held on a chuck, which is mounted on themovable stage 57, and a pattern of the reticle R is transferred in areduced scale onto different regions on the wafer W by means of thelight source 61 and the projection optical system 62, in accordance witha step-and-repeat method or a step-and-scan method.

It should be noted that the substrate attracting device describedhereinbefore can be similarly applied also to an exposure apparatus inwhich, without using a mask, a circuit pattern is directly drawn on asemiconductor wafer to expose a resist thereon.

The present invention can be embodied in various aspects, and examplesare as follows.

(1) A substrate attracting device having a substrate attracting portion,including a vacuum attracting mechanism and an electrostatic attractingmechanism, characterized in that the substrate attracting portion has asubstrate carrying surface defined by at least a ring-like rim and firstand second protrusions groups, each protrusion of the first protrusiongroup having a carrying surface area and a minimum protrusion intervallarger than those of each protrusion of the second protrusion group.

(2) A substrate attracting device according to Item (1), wherein a totalarea of the substrate carrying surface defined by the first protrusiongroup is larger than a total area of the substrate carrying surfacedefined by the second protrusion group.

(3) A substrate attracting device according to Item (1) or Item (2),wherein the first protrusion group is mainly for electrostaticattraction, while the second protrusion group is mainly for vacuumattraction.

(4) A substrate attracting device according to any one of Items (1)-(3),wherein the first protrusion group is protrusions mainly for attractingand holding the substrate during electrostatic attraction, and thesecond protrusion group is protrusions mainly for suppressing flexure ofthe substrate during vacuum attraction.

(5) A substrate attracting device according to any one of Items (1)-(4),wherein each of the first and second protrusion groups has a height notlower than 50 im.

(6) A substrate attracting device having a substrate attracting portion,including an electrostatic attracting mechanism, characterized by anelectrode for electrostatic attraction and having two or more powersupplying terminals at the substrate attracting portion.

(7) A substrate attracting device according to Item (6), wherein, to thetwo or more power supplying terminals, electrical power is supplied fromseparate power supplying systems.

(8) A substrate attracting device according to Item (6) or Item (7),wherein the two power supplying terminals are for during movement of thesubstrate attracting portion and for during stationary fixation of thesubstrate attracting portion, respectively.

(9) A substrate attracting device according to any one of Items (6)-(8),wherein the two power supplying terminals are a power supplying terminalto which electrical power is supplied from a conveying system forconveying the substrate attracting portion, and a power supplyingterminal to which electrical power is supplied from a chamber or astage.

(10) A substrate attracting device according to any one of Items(6)-(9), wherein, when a substrate is placed on the substrate attractingportion, the electrostatic attracting mechanism is continuouslyenergized through the two or more power supplying terminals.

(11) A substrate attracting device having an electrostatic attractingmechanism, characterized by a substrate attracting portion having aplurality of electrostatic attraction electrodes disposed in astripe-like fashion, means for applying a voltage to the plurality ofelectrodes independently of each other, and a mechanism for relativelyrotating the substrate attracting portion relative to a substrate to beattracted by the substrate attracting portion.

(12) A substrate attracting device according to Item (11), wherein thesubstrate attracting portion is rotated in a direction effective tocorrect the flatness of the substrate.

(13) A substrate attracting device according to Item (11) or Item (12),wherein the substrate attracting portion is rotated in a horizontaldirection.

(14) A substrate attracting device according to any one of Items(11)-(13), wherein the substrate attracting portion is rotated outside asubstrate processing chamber where a predetermined process is to beperformed to the substrate attracted to the substrate attractingportion.

(15) A substrate attracting device, characterized by a substrateattracting portion having a vacuum attracting mechanism, a vacuumexhaust pipe disposed opposed to a vacuum exhaust port formed in thesubstrate attracting portion, with a small clearance interveningtherebetween, and a partition wall effective to prevent inflow of a gasoutside the substrate attracting portion through the small clearance.

(16) A substrate attracting device according to Item (15), wherein thepartition wall is disposed at a position out of contact to the substrateattracting portion, and wherein there is an exhaust mechanism forexhausting a space between the substrate attracting portion and thepartition wall.

(17) A substrate attracting device according to Item (15) or Item (16),wherein the substrate attracting portion is made conveyable.

(18) A substrate attracting device according to any one of Items(15)-(17), wherein the vacuum exhaust pipe and the partition wall areprovided outside a substrate processing chamber in which a predeterminedprocess is to be carried out to the substrate attracted to the substrateattracting portion.

(19) A substrate attracting device having a substrate attractingportion, including an electrostatic attracting mechanism, characterizedby control means operable so that, when the substrate is attracted tothe substrate attracting portion, a peripheral portion of the substrateand a clearance between the substrate and the substrate attractingportion are depressurized and, thereafter, only the clearance betweenthe substrate and the substrate attracting portion is furtherdepressurized, and, subsequently, the electrostatic attracting mechanismis actuated.

(20) A substrate attracting device according to Item (19), wherein thesubstrate attracting portion includes a vacuum attracting mechanism, andwherein the control means includes an exhaust system in which a vacuumapplying pipe for the periphery of the substrate and a vacuum attractingpipe of the vacuum attracting mechanism are communicated with eachother.

(21) A substrate attracting device according to Item (19) or Item (20),wherein the control means includes a measuring device for measuringpressures in the periphery of the substrate and in the clearance betweenthe substrate and the substrate attracting portion.

(22) A substrate attracting device according to any one of Items(1)-(21), wherein there is a base member for supporting the substrateattracting portion at three points.

(23) A substrate attracting device according to Item (22), wherein thesubstrate attracting portion, as supported by the base member at threepoints, has been flattened in a state of deformation defined while beingsupported by the three points.

(24) A chuck for holding a substrate through vacuum attraction andelectrostatic attraction, characterized by a plurality of firstprotrusions for electrostatic attraction of the substrate, and aplurality of second protrusions provided between the first protrusions,for supporting the substrate.

(25) A chuck according to Item (24), further characterized by a terminalfor receiving electrical power during conveyance.

(26) A holding device for holding a chuck as noted in Item (24) or Item(25), characterized by including exhausting means for vacuum attractingthe substrate on the chuck, and power supplying means forelectrostatically attracting the substrate on the chuck.

(27) A holding device according to Item (26), wherein the exhaustingmeans exhausts the clearance between the chuck and the substrate withoutcontact to the chuck.

(28) A holding device according to Item (27), wherein the powersupplying means supplies electrical power on the basis of the pressurein the clearance.

(29) An exposure apparatus characterized by including a substrateattracting device as noted in any one of Items (1)-(23) or a holdingdevice as noted in any one of Items (26)-(28).

(30) A device manufacturing method, characterized by producing a deviceby use of an exposure apparatus as noted in Item (29).

While the invention has been described with reference to the structuresdisclosed herein, it is not confined to the details set forth and thisapplication is intended to cover such modifications or changes as maycome within the purposes of the improvements or the scope of thefollowing claims.

1. A substrate holding system comprising: a substrate attracting deviceincluding a vacuum-attracting mechanism and an electrostatic-attractingmechanism, wherein the substrate attracting device has a substratesupporting surface formed with a ring-like rim and first and secondprotrusion groups, wherein a substrate supporting surface area of eachprotrusion of the first protrusion group is larger than a substratesupporting surface area of each protrusion of the second protrusiongroup, wherein a protrusion interval of the first protrusion group islarger than a protrusion interval of the second protrusion group, andwherein a total area of the substrate supporting surfaces of the firstprotrusion group is larger than a total area of the substrate supportingsurfaces of the second protrusion group.
 2. A substrate holding systemaccording to claim 1, wherein the first protrusion group mainlyfunctions for electrostatic attraction, while the second protrusiongroup mainly functions for vacuum attraction.
 3. A substrate holdingsystem according to claim 1, wherein the first protrusion groupcomprises protrusions configured to attract and to hold the substratemainly during electrostatic attraction, and wherein the secondprotrusion group comprises protrusions configured to attract and to holdthe substrate mainly during vacuum attraction.
 4. A substrate holdingsystem according to claim 1, wherein the first protrusion group and thesecond protrusion group have a height not less than 50 μm.
 5. Anexposure apparatus comprising: a substrate holding system configured tohold a substrate to be exposed; and an exposure device configured toexpose the substrate, wherein the substrate holding system has asubstrate attracting device including a vacuum-attracting mechanism andan electrostatic-attracting mechanism, wherein the substrate attractingdevice has a substrate supporting surface formed with a ring-like rimand first and second protrusion groups, wherein a substrate supportingsurface area of each protrusion of the first protrusion group is largerthan a substrate supporting surface area of each protrusion of thesecond protrusion group, wherein a protrusion interval of the firstprotrusion group is larger than a protrusion interval of the secondprotrusion group, and wherein a total area of the substrate supportingsurfaces of the first protrusion group is larger than a total area ofthe substrate supporting surfaces of the second protrusion group.
 6. Adevice manufacturing method comprising the steps of: holding a substrateby use of a substrate holding system of an exposure apparatus; exposingthe substrate by use of the exposure apparatus, while the substrate isbeing held by the substrate holding system; and developing the exposedsubstrate, wherein the substrate holding system has a substrateattracting device including a vacuum-attracting mechanism and anelectrostatic-attracting mechanism, wherein the substrate attractingdevice has a substrate supporting surface formed with a ring-like rimand first and second protrusion groups, wherein a substrate supportingsurface area of each protrusion of the first protrusion group is largerthan a substrate supporting surface area of each protrusion of thesecond protrusion group, wherein a protrusion interval of the firstprotrusion group is larger than a protrusion interval of the secondprotrusion group, and wherein a total area of the substrate supportingsurfaces of the first protrusion group is larger than a total area ofthe substrate supporting surfaces of the second protrusion group.